Physical vapor deposition

Authors

Yoke Khin Yap, Michigan Technological UniversityFollow

Document Type

Contribution to Book

Publication Date

2012

Department

Department of Physics

Publisher's Statement

© Springer Science+Business Media B.V. 2012. Publisher's version of record: https://doi.org/10.1007/978-90-481-9751-4

Publication Title

Encyclopedia of Nanotechnology

ISBN

978-90-481-9751-4

Recommended Citation

Yap, Y. K. (2012). Physical vapor deposition. Encyclopedia of Nanotechnology. http://doi.org/10.1007/978-90-481-9751-4_362
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/76