Chemical vapor deposition (CVD)
Document Type
Contribution to Book
Publication Date
2012
Department
Department of Physics
Publication Title
Encyclopedia of Nanotechnology
Recommended Citation
Yap, Y. K.
(2012).
Chemical vapor deposition (CVD).
Encyclopedia of Nanotechnology.
http://doi.org/10.1007/978-90-481-9751-4_345
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/75
Publisher's Statement
© Springer Science+Business Media B.V. 2012. Publisher's version of record: https://doi.org/10.1007/978-90-481-9751-4