Physical Vapor Deposition

Authors

Yoke Khin Yap, Michigan Technological UniversityFollow
Dongyan Zhang, Michigan Technological UniversityFollow

Document Type

Contribution to Book

Publication Date

1-7-2016

Department

Department of Physics

Publisher's Statement

© Springer Science+Business Media Dordrecht 2015. Publisher's version of record: https://doi.org/10.1007/978-94-007-6178-0_362-3

Publication Title

Encyclopedia of Nanotechnology

ISBN

978-94-007-6178-0

Recommended Citation

Yap, Y. K., & Zhang, D. (2016). Physical Vapor Deposition. Encyclopedia of Nanotechnology. http://doi.org/10.1007/978-94-007-6178-0_362-3
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/85