Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes

Document Type

Conference Proceeding

Publication Date

12-1-2004

Abstract

A smart cantilever structure using single-crystal relaxor ferroelectric material is presented. The smart cantilever possesses both sensing and actuation capabilities, embedded in a monomorph and resulting in a smart structure. Single crystal relaxor ferroelectric materials (1-x)Pb(Zn 1/3Nb 2/3)O 3-xPbTiO 3 (PZN-PT) and (1-x)Pb(Mg 1/3Nb 2/3)O 3-xPbTiO 3 (PMN-PT) are ideal for actuator and sensor applications since they exhibit very high piezoelectric coefficients. We separately pattern interdigitated electrodes on the top and bottom surfaces of a single crystal cantilever beam. The interdigitated electrode design results in an electric field- gradient that after poling not only induces flapping actuation but also, simultaneously, allows us to detect internally or externally induced stresses. As a monolithic actuator integrated with a sensor, it has potential applications in various Micro-Electro-Mechanical Systems (MEMS), Scanning Probe Microscopy (SPM) and Near-field Scanning Optical Microscopy (NSOM). We fabricate monomorph prototypes and characterize their performance in terms of actuation displacement and sensing capabilities, respectively. Finally, an active vibration control experiment was successfully conducted by using the smart cantilever structure.

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

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