Title

Diamond scribing and breaking of silicon for MEMS die separation

Authors

A. D. Oliver, Sandia National Laborotories
T. A. Wallner, Sandia National Laborotories
R. Tandon, Sandia National Laboratories
K Nieman, Sandia National Laboratories
Paul L. Bergstrom, Michigan Technological UniversityFollow

Document Type

Article

Publication Date

6-13-2008

Abstract

We describe a post-release die separation process for 1 0 0 silicon wafers with polysilicon surface micromachines using a combination of diamond scribing and mechanical breaking. The theoretical basis of scribing is reviewed and the theoretical relationship between scribe force and median crack depth was experimentally verified. Also the relationship between the scribe angle and the median crack depth as well as the stress to fracture is described. Scribe speed and scribe wear were also investigated. The results from our experiments were used to develop a process that had yields above 80% for two types of electrostatic MEMS actuators.

Publisher's Statement

© 2008 IOP PUBLISHING, LTD

Publisher's version of record: https://doi.org/10.1088/0960-1317/18/7/075026

Publication Title

Journal of Micromechanics and Microengineering

Recommended Citation

Oliver, A. D., Wallner, T. A., Tandon, R., Nieman, K., & Bergstrom, P. L. (2008). Diamond scribing and breaking of silicon for MEMS die separation. Journal of Micromechanics and Microengineering, 18(7). http://doi.org/10.1088/0960-1317/18/7/075026
Retrieved from: https://digitalcommons.mtu.edu/ece_fp/20