Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning

Document Type

Article

Publication Date

1-1-2026

Abstract

Micro-scale scan mirrors at the distal optics of laser-based imaging systems can reduce instrument size while providing large field-of-view and limited optical aberrations. Benefits are greatest if mirrors possess a wide range of motion, high operating frequency, and addressable static positioning. Here, we demonstrate how a piezoelectric micromirror based on a simple dual cantilever architecture can provide both a large static scan angle in one axis and high-frequency, large-angle operation in two axes, leveraging nonlinear dynamics in bending and torsion. Prototype mirrors with small form factor (1.4 x 0.4 mm2 reflector in 1.8\times 2.1 mm2 chip) achieve a total mechanical scan angle (MSA) of 112° in slow axis resonance, including 11° of addressable static scan angle, and a total MSA of 15° excited at 3 kHz in the fast axis. A bar and hinge simulation model is introduced that accurately captures nonlinear dynamics. These capabilities are suitable for high frame rates in either Lissajous or raster scan patterns in microendoscope form factors, while static scan angle in bending enables significant 1D addressability.

Publication Title

Journal of Microelectromechanical Systems

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