Uniform p-type doping of silicon nanowires synthesized via vapor-liquid-solid growth with silicon tetrachloride
Document Type
Article
Publication Date
12-21-2017
Abstract
© 2017 Author(s). Boron-doped silicon nanowires (SiNWs) grown by the vapor-liquid-solid growth mechanism using silicon tetrachloride (SiCl4) as the silicon precursor and trimethylboron (TMB) as the boron source were studied to understand the axial and radial doping uniformity. TMB-doped SiNWs with diameters up to 400 nm and lengths > 7.5 μm were integrated into a global back-gated test structure with multiple electrodes for electrical characterization. From gate modulated measurements, the SiNWs were confirmed to be heavily doped p-type. Multiple four point resistivity measurements across a total length of 7.5 μm were taken on as-grown SiNWs. Resistivity, corrected for surface charge, was determined to be 0.01 +/- 0.002 Ω cm along the entire length of the as-grown boron doped SiNWs. This was also observed in the axial direction for etched SiNWs, with corrected resistivity of 0.01 +/- 0.003 Ω cm, therefore confirming the uniform p-type doping of SiNWs using TMB and SiCl4 as precursors.
Publication Title
Journal of Applied Physics
Recommended Citation
Kendrick, C.,
Kuo, M.,
Li, J.,
Shen, H.,
Mayer, T.,
&
Redwing, J.
(2017).
Uniform p-type doping of silicon nanowires synthesized via vapor-liquid-solid growth with silicon tetrachloride.
Journal of Applied Physics,
122(23).
http://doi.org/10.1063/1.4993632
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/9018