A simple learning control to eliminate RF-MEMS switch bounce
Document Type
Article
Publication Date
5-6-2009
Department
Department of Mechanical Engineering-Engineering Mechanics
Abstract
A learning control algorithm is presented that reduces the closing time of a radio-frequency microelectromechanical systems switch by minimizing bounce while maintaining robustness to fabrication variability. The switch consists of a plate supported by folded-beam springs. Electrostatic actuation of the plate causes pull-in with high impact velocities, which are difficult to control due to parameter variations from part to part. A single degree-of-freedom model was utilized to design a simple learning control algorithm that shapes the actuation voltage based on the open/closed state of the switch. Experiments on three different test switches show that after 5-10 iterations, the learning algorithm lands the switch plate with an impact velocity not exceeding 0.20 m/s, eliminating bounce. Simulations show that robustness to parameter variation is directly related to the number of required iterations for the device to learn the input for a bounce-free closure. © 2009 IEEE.
Publication Title
Journal of Microelectromechanical Systems
Recommended Citation
Blecke, J.,
Epp, D.,
Sumali, H.,
&
Parker, G.
(2009).
A simple learning control to eliminate RF-MEMS switch bounce.
Journal of Microelectromechanical Systems,
18(2), 458-465.
http://doi.org/10.1109/JMEMS.2008.2007243
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/2148