Data-dependent systems profilometry of two-dimensional surfaces
Document Type
Article
Publication Date
10-20-1999
Abstract
Fourier-transform profilometry (FTP) and data-dependent systems profilometry (DDSP) are two methods that are available for recovering one-dimensional fine surface profiles from the phase of a single interferogram. FTP has already been extended to two-dimensional surfaces; a similar extension of DDSP is introduced here. Inasmuch as this extension involves autoregressive modeling of the rows or columns of an interferogram, the feasibility of using a common model order is explored. The common order reduces not only the amount of computation but also the errors caused by the heterodyned phase-removal procedure. As autoregression requires masking the first few data values, the length of the mask is determined by means of a Green’s function. A comparison shows that DDSP outperforms FTP in roughness measurements in terms of rms and center-line average. The comparison also shows that DDSP is able to recover a detailed surface, whereas FTP outlines only the global features. An interferogram regeneration procedure provides a reference surface for the verification of results. © 1999 Optical Society of America.
Publication Title
Applied Optics
Recommended Citation
Pandit, S.,
&
Chan, D.
(1999).
Data-dependent systems profilometry of two-dimensional surfaces.
Applied Optics,
38(31), 6540-6549.
http://doi.org/10.1364/AO.38.006540
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/13236