MEMS spatial light modulators with integrated electronics
Document Type
Conference Proceeding
Publication Date
1-1-2003
Abstract
The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spatial light modulator (μSLM) with complementary metal-oxide semiconductor (CMOS) electronics, for control of optical phase is presented in this paper. An array of 32 × 32 piston-motion MEMS mirror segments make up the μSLM. Each mirror segment will be capable of altering the phase of reflected light by up to one wavelength for infrared illumination (? =1.5 μm). The mirror segments are fabricated from metal in a low temperature process allowing for vertical integration of the μSLM with CMOS based, multi-bit, control electronics. The surface of the CMOS is planarized to facilitate μSLM-CMOS integration. The fabrication process and process development results, test results, including frequency response and electromechanical characterization of the (μSLM) actuators, will be presented.
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Recommended Citation
Becker, T.,
Bifano, T.,
Lee, H.,
Miller, M.,
Bierden, P.,
&
Cornelissen, S.
(2003).
MEMS spatial light modulators with integrated electronics.
Proceedings of SPIE - The International Society for Optical Engineering,
4983, 248-258.
http://doi.org/10.1117/12.477931
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/12109