Large-scale metal MEMS mirror arrays with integrated electronics
Document Type
Article
Publication Date
1-1-2002
Abstract
Design, microfabrication, and integration of a micromachined spatial light modulator (μSLM) device are described. A large array of electrostatically actuated, piston-motion MEMS mirror segments make up the optical surface of the μSLM. Each mirror segment is capable of altering the phase of reflected light by up to one wavelength for infrared illumination (λ = 1.5 μm), with 4-bit resolution. The device is directly integrated with complementary metal-oxide semiconductor (CMOS) electronics, for control of spatial optical wavefront. Integration with electronics is achieved through direct fabrication of MEMS actuators and mirror structures on planarized foundry-type CMOS electronics. Technical approaches to two significant challenges associated with manufacturing the μSLM are discussed: integration of the MEMS array with the electronic driver array and production of optical-quality mirror elements using a metal-polymer surface micromachining process.
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Recommended Citation
Bifano, T.,
Bierden, P.,
Cornelissen, S.,
Dimas, C.,
Lee, H.,
Miller, M.,
&
Perreault, J.
(2002).
Large-scale metal MEMS mirror arrays with integrated electronics.
Proceedings of SPIE - The International Society for Optical Engineering,
4755, 467-476.
http://doi.org/10.1117/12.462845
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/12107