Macro porous silicon as pump media for electro-osmotic pumps

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Micro pumps are a critical component in micro fluidic systems. Due to its ability to generate high flow-rate/pressure without using any moving parts, electro-osmotic (EO) pumps are an appealing candidate for micro applications. As part of the effort to produce miniaturized EO pumps, macro porous silicon (PS) with high aspect ratio pores has been investigated as the pump media. Initial tests in a meso-scale pump body produced a maximum pressure of 5.2 kPa and a very large flow rate of 11.9 μl min–1 mm–2 at 60 V, demonstrating macro PS as a promising material for micro scale, high flow-rate/pressure EO pumps. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim . Publisher's version of record: https://dx.doi.org/10.1002/pssa.200674326

Publication Title

physica status solidi (a)