PZN-PT single-crystal thin film monomorph actuator
We report on the use of single-crystal lead zinc niobate-lead titanate films in monomorph actuators. The article responds to the growing interest in solid-solution (1 - x)Pb(Zn1/3Nb2/3)O 3-xPbTiO3 relaxor ferroelectrics based on their large piezoelectric coefficients and their integration into microelectromechanical system. Freestanding films are fabricated by slicing a 7 μm-thick layer off the crystal bulk and assembled into a flexural actuator, thus circumventing polycrystalline deposition techniques. One-micron deflections are observed at 100 V for ∼1 mm-long films. The article discusses the non-uniform electric field distribution profile established in the films and its role in the actuation process. © 2002 Taylor & Francis.
Ferroelectrics, Letters Section
PZN-PT single-crystal thin film monomorph actuator.
Ferroelectrics, Letters Section,
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