Chemical Vapor Deposition (CVD)

Authors

Yoke Khin Yap, Michigan Technological UniversityFollow
Dongyan Zhang, Michigan Technological UniversityFollow

Document Type

Contribution to Book

Publication Date

10-20-2015

Department

Department of Physics

Publisher's Statement

© Springer Science+Business Media Dordrecht 2015. Publisher's version of record: https://doi.org/10.1007/978-94-007-6178-0

Publication Title

Encyclopedia of Nanotechnology

Recommended Citation

Yap, Y. K., & Zhang, D. (2015). Chemical Vapor Deposition (CVD). Encyclopedia of Nanotechnology. http://doi.org/10.1007/978-94-007-6178-0
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/91