Title

Spatial distributions of absolute densities of argon metastable state 3p < sup> 5 4s in a Gaseous Electronics Conference Reference Cell

Document Type

Article

Publication Date

11-1-1999

Abstract

The spatial distributions of the 3p54s metastable state of Ar have been measured in radio frequency argon plasmas in a Gaseous Electronics Conference Reference Cell by means of high resolution absorption spectroscopy. A single-mode, tunable diode laser has been used to obtain absorption profiles at 750 and 801 nm. Spatial profiles across the gap between electrodes have been measured with 1 mm resolution for various pressures (0.15-1.0 Torr) and plasma powers (1-320 W). The densities of 3p54s metastable were obtained from integrated absorption profiles. © 1999 American Institute of Physics.

Publication Title

Journal of Applied Physics

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