Spatial distributions of absolute densities of argon metastable state 3p < sup> 5 4s in a Gaseous Electronics Conference Reference Cell
Document Type
Article
Publication Date
11-1-1999
Abstract
The spatial distributions of the 3p54s metastable state of Ar have been measured in radio frequency argon plasmas in a Gaseous Electronics Conference Reference Cell by means of high resolution absorption spectroscopy. A single-mode, tunable diode laser has been used to obtain absorption profiles at 750 and 801 nm. Spatial profiles across the gap between electrodes have been measured with 1 mm resolution for various pressures (0.15-1.0 Torr) and plasma powers (1-320 W). The densities of 3p54s metastable were obtained from integrated absorption profiles. © 1999 American Institute of Physics.
Publication Title
Journal of Applied Physics
Recommended Citation
Augustyniak, E.,
Filimonov, S.,
&
Borysow, J.
(1999).
Spatial distributions of absolute densities of argon metastable state 3p < sup> 5 4s in a Gaseous Electronics Conference Reference Cell.
Journal of Applied Physics,
86(9), 4767-4771.
http://doi.org/10.1063/1.371441
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/8939