Title

Thermal exfoliation and crystallographic transformation of single-crystal metal oxides induced by He-ion implantation

Document Type

Article

Publication Date

9-1-2003

Abstract

Thermal exfoliation and crystallographic transformation of single-crystal metal oxides induced by He-ion implantation were investigated. It was shown that the cavities grow in size due to increased internal stresses caused by molecular hydrogen on thermal treatment. An ion-beam-induced crystallographic phase transformation and broad depth profile of ion-beam-induced defects were observed in PZN-PT. The exfoliation occurs at higher temperatures in PZN-PT than in LiNbO3.

Publication Title

Journal of Applied Physics

Share

COinS