Low-loss crystal-ion-sliced single-crystal potassium tantalate films
Document Type
Article
Publication Date
2-11-2002
Abstract
The dielectric response has been studied in 10-μm-thick, single-crystal potassium tantalate films formed by crystal ion slicing. Scanning microwave microscopy shows that the implanted, pre-etched samples exhibit a bulk-like permittivity and low-loss tangent (0.0009) at 1.7 GHz. The separated free-standing films have somewhat higher loss tangents due to residual-ion-induced stress. Selective relaxation of this stress by etching or annealing reduces the dielectric loss. © 2002 American Institute of Physics.
Publication Title
Applied Physics Letters
Recommended Citation
Izuhara, T.,
Osgood, R.,
Levy, M.,
Reeves, M.,
Wang, Y.,
Roy, A.,
&
Bakhru, H.
(2002).
Low-loss crystal-ion-sliced single-crystal potassium tantalate films.
Applied Physics Letters,
80(6), 1046-1048.
http://doi.org/10.1063/1.1446214
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/8818