Title

Electron paramagnetic resonance characterization of diamond films fabricated with different methane concentrations

Document Type

Article

Publication Date

12-16-1996

Abstract

Electron paramagnetic resonance (EPR) studies were performed on thin diamond films fabricated by hot-filament chemical vapor deposition using methane concentrations varying from 0.25% to 5%. The bulk spin concentration and the peak to peak linewidth for the characteristic g =2.0027(2) EPR spectrum were found to increase for samples grown with increased methane concentration. The results show the spectrum contains component/s due to paramagnetic defects related to nondiamond carbon phases within the films. © 1996 American Institute of Physics.

Publication Title

Applied Physics Letters

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