Title

Physical Vapor Deposition

Document Type

Contribution to Book

Publication Date

1-7-2016

Department

Department of Physics

Publisher's Statement

© Springer Science+Business Media Dordrecht 2015. Publisher's version of record: https://doi.org/10.1007/978-94-007-6178-0_362-3

Publication Title

Encyclopedia of Nanotechnology

ISBN

978-94-007-6178-0

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