Micromechanical machining of high aspect ratio prototypes

Document Type

Conference Proceeding

Publication Date

8-2002

Department

Department of Mechanical Engineering-Engineering Mechanics

Abstract

Micromechanical machining uses physical cutting tools in high precision machines to fabricate parts with micrometers features and sub-micrometer tolerances. An advantage of this process is the ability to use any machinable material, quick process planning and material removal, and three-dimensional geometry only limited by the machine and tools used. Disadvantages are that forces are placed on micro cutting tools causing deflection and possible breaking. Deflection reduces process precision and tool breakage results in repeated set up, slower production, and poorer tolerances. Nevertheless, these processes have created many diverse prototypes ranging from biomedical to space applications.

Publication Title

Microsystem Technologies

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