Title

Computing thin film mechanical properties with the Oliver and Pharr method

Document Type

Article

Publication Date

2-10-2011

Department

Department of Materials Science and Engineering

Abstract

A commonly used technique to compute mechanical properties from indentation tests is the Oliver and Pharr method. Using dimensional analysis and finite element modeling, this paper investigates errors when the Oliver and Pharr method is used to compute thin film properties.

Publication Title

MRS Online Proceedings Library (OPL)

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