Computing thin film mechanical properties with the Oliver and Pharr method
Document Type
Article
Publication Date
2-10-2011
Department
Department of Materials Science and Engineering
Abstract
A commonly used technique to compute mechanical properties from indentation tests is the Oliver and Pharr method. Using dimensional analysis and finite element modeling, this paper investigates errors when the Oliver and Pharr method is used to compute thin film properties.
Publication Title
MRS Online Proceedings Library (OPL)
Recommended Citation
Wolff, P. J.,
Lucas, B. N.,
&
Herbert, E. G.
(2011).
Computing thin film mechanical properties with the Oliver and Pharr method.
MRS Online Proceedings Library (OPL),
594.
http://doi.org/10.1557/PROC-594-301
Retrieved from: https://digitalcommons.mtu.edu/michigantech-p/14336