Micromorphology analysis of sputtered indium tin oxide fabricated with variable ambient combinations
This study experimentally investigates the fractal nature of DC magnetron sputtered indium-tin oxide (ITO) fabricated utilizing mixed ambient combinations and post-annealed at 450 °C in air towards solar cell applications. The structural properties of the films were examined by X-ray diffraction technique. In addition, three-dimensional (3-D) surface morphology of the films was analyzed using the areal autocorrelation function and pseudo-topothesy K for the atomic force microscopy images. The fractal nature of films was co-related with respect to electrical and optical properties of ITO films prepared under five different ambient conditions.
Pearce, J. M.,
Micromorphology analysis of sputtered indium tin oxide fabricated with variable ambient combinations.
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