Part of the Engineering Commons
2004
2003
Evolution of Microstructure and Phase in Amorphous, Protocrystalline, and Microcrystalline Silicon Studied by Real Time Spectroscopic Ellipsometry, R. W. Collins, A. S. Ferlauto, G. M. Ferreira, Chi Chen, Joohyun Koh, R. J. Koval, Joshua M. Pearce, C. R. Wronski
Joshua M. Pearce
2002