Evolution of Microstructure and Phase in Amorphous, Protocrystalline, and Microcrystalline Silicon Studied by Real Time Spectroscopic Ellipsometry, R. W. Collins, A. S. Ferlauto, G. M. Ferreira, Chi Chen, Joohyun Koh, R. J. Koval, Joshua M. Pearce, C. R. Wronski
Joshua M. Pearce