Part of the Engineering Commons
2004
Kinetics of Silicon Film Growth and the Deposition Phase Diagram, G. Ferreira, A. Ferlauto, Chi Chen, Joshua Pearce, R. Koval, C. Ross, C. Wronski, Robert Collins
Joshua M. Pearce
2003
Evolution of Microstructure and Phase in Amorphous, Protocrystalline, and Microcrystalline Silicon Studied by Real Time Spectroscopic Ellipsometry, R. W. Collins, A. S. Ferlauto, G. M. Ferreira, Chi Chen, Joohyun Koh, R. J. Koval, Joshua M. Pearce, C. R. Wronski
Joshua M. Pearce
2002