Title

A porous silicon based particle filter for microsystems

Document Type

Conference Paper/Presentation

Publication Date

4-16-2007

Abstract

A porous silicon (PS) based particle filter has been fabricated and tested for integrated microsystems. By engineering the morphology of the porous silicon membrane, depth filtration with high collection efficiency in the submicron range (0.3∼1 μm), low pressure-drop, and large filtration capacity (0.5 mg/cm2) has been demonstrated. With the PS particle filter, on-board gas filtration can be achieved. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

Publisher's Statement

© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Publisher's version of record: https://dx.doi.org/10.1002/pssa.200674387

Publication Title

physica status solidi a